Effect of the thermal annealing on the properties of RF sputtered Mo-AlNxOy composite thin films

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dc.citation.volume129
dc.contributor.authorBraga, Thyago Santos
dc.contributor.authorMassi, Marcos [UNIFESP]
dc.contributor.authorDuarte, Diego Alexandre
dc.contributor.authorSilva Sobrinho, Argemiro Soares
dc.contributor.authorAlves Cardoso, Guilherme Wellington
dc.contributor.authorPereira, Fabian Pinto
dc.contributor.authorBarros Machado, Joao Paulo
dc.contributor.authorOtani, Choyu
dc.coverageOxford
dc.date.accessioned2020-08-14T13:44:32Z
dc.date.available2020-08-14T13:44:32Z
dc.date.issued2016
dc.description.abstractIn the last few years, the concentrating solar power (CSP) systems have been studied and growing surprisingly in several countries. The science and technology involved to manufacture the special materials for these devices has been a determining factor for the system performance. Among these special materials, ceramic-metal composite (cermet) is an important class largely used as a main absorber in the selective surfaces of evacuated tube collectors. This work aims to manufacture Mo-AlNxOy thin films by magnetron sputtering technique. The parameter studied was the effect of annealing temperature (600 degrees C-1100 degrees C) on the optical properties and surface morphology of the films. The results showed that the annealing (800-1100 degrees C) increase the absorptance, produces an oxidation in the bulk of the films and a breakage in the AlN surface bonds, reducing the initial quantity of nitrogen. It is noteworthy that the annealing at 600 degrees C did not alter the optical and morphology properties of the films, suggesting that the films of Mo-AlNxOy produced can be applied in selective surfaces in the future. (C) 2016 Elsevier Ltd. All rights reserved.en
dc.description.affiliationTechnol Inst Aeronaut, Plasmas & Proc Lab, BR-12228900 Sao Jose Dos Campos, SP, Brazil
dc.description.affiliationUniv Fed Sao Paulo, Inst Sci & Technol, BR-12231280 Sao Jose Dos Campos, SP, Brazil
dc.description.affiliationNatl Inst Space Res, Associate Lab Sensors & Mat LAS, BR-12227010 Sao Jose Dos Campos, SP, Brazil
dc.description.affiliationUnifespUniv Fed Sao Paulo, Inst Sci & Technol, BR-12231280 Sao Jose Dos Campos, SP, Brazil
dc.description.sourceWeb of Science
dc.description.sponsorshipNational Counsel of Technological and Scientific Development (CNPq)
dc.description.sponsorshipSao Paulo Research Foundation (FAPESP)
dc.format.extent115-121
dc.identifierhttp://dx.doi.org/10.1016/j.vacuum.2016.04.024
dc.identifier.citationVacuum. Oxford, v. 129, p. 115-121, 2016.
dc.identifier.doi10.1016/j.vacuum.2016.04.024
dc.identifier.issn0042-207X
dc.identifier.urihttps://repositorio.unifesp.br/handle/11600/57718
dc.identifier.wosWOS:000377313500018
dc.language.isoeng
dc.publisherPergamon-Elsevier Science Ltd
dc.relation.ispartofVacuum
dc.rightsAcesso restrito
dc.subjectMo-AlNxOyen
dc.subjectMagnetron sputteringen
dc.subjectThin filmsen
dc.subjectThermal annealingen
dc.titleEffect of the thermal annealing on the properties of RF sputtered Mo-AlNxOy composite thin filmsen
dc.typeArtigo
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